Fabrication process for the B-doped Si / Si two-layer back-plate MEMS microphone was also given .
结合硼掺杂硅/硅复合背板结构MEMS传声器，提供了参考制作工艺流程。
Design of MEMS Silicon Capacitive Microphone with a Piston Structure
活塞式硅微电容传声器设计
MEMS MicrophoneMEMS MicrophoneMEMS Microphone